エフオーテクニカMOVE-Fab

Semiconductor Dry Pumps Overhaul

FOT MOVE-Fab, our new engineering facility located in Miyazaki, provides semiconductor dry pumps overhaul including process maintenances and troubleshooting of clients’ facilities. Our expert engineers undertake overhaul, remodeling and tinkering of vacuum pumps with the request from semiconductor factories. Overhaul of cryo pumps and robots are also available. We also sell and evaluate various equipment.